Fully Batch-fabricated Mems Magnetic Vibrational Energy Harvesters
نویسندگان
چکیده
This paper reports the fabrication and characterization of fully-integrated, fully-batch-microfabricated electromagnetic vibrational energy harvesters. The 4 – 15 mm structures utilize embedded NdFeB powder micromagnet technology, and represent some of the smallest magnetic energy harvesters demonstrated to date. Of three different designs, the best performing demonstrated 13.2 μVrms at the device resonance of 530 Hz and 1 g (9.8 m/s) excitation. This corresponds to a predicted maximum output power of 23 pW and a normalized power density of 1.6 ×10 W/cm·g. While the power from these prototype devices is limited, ongoing design and fabrication improvements aim to increase their performance.
منابع مشابه
Homogeneity Analysis of High Yield Manufacturing Process of Mems-based Pzt Thick Film Vibrational Energy Harvesters
This work presents a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibrational energy harvesters aimed towards vibration sources with peak frequencies in the range of a few hundred Hz. By combining KOH etching with mechanical front side protection, SOI wafer to accurately define the thickness of the silicon part of the harvester and a silicon compatible PZT th...
متن کاملAn Electromagnetic Energy Harvester with Integrated Magnet Array
An electromagnetic energy harvester with integrated CoNiMnP permanent magnet array is designed, fabricated and tested. Mechanical and magnetic simulations are performed to investigate the vibration characteristics and magnetic field distribution. The size and shape of the device are also optimized. CoNiMnP permanent magnet array is fabricated using electroplating technology instead of manually ...
متن کاملStudying piezoelastic and piezomagnetoelastic configurations for different excitation frequencies in MEMS energy harvesters
Typically two configurations are used for energy harvesting with different advantages: piezoelastic and piezomagnetoelastic. Best performance of the piezoelastic configuration is when the excitation frequency is close to the resonance frequency. If the input frequency slightly deviates from the natural frequency, the generated power is severely decreased. To tackle the problem, the piezomagneto...
متن کاملA Review of MEMS Based Piezoelectric Energy Harvester for Low Frequency Applications
This paper presents a review of MEMS based piezoelectric energy harvesting for low frequency and low power applications. An introduction to MEMS and its components along with the concept of energy harvesting is presented. The paper also presents a device configuration of cantilever based basic components of MEMS energy harvesters, i.e. unimorph, bimorph. Results of different designs for MEMS en...
متن کاملVIBRATION ENERGY HARVESTERS OF LEAD-FREE (K,Na)NbO3 PIEZOELECTRIC THIN FILMS
In this study, we fabricated piezoelectric energy harvesters composed of lead-free (K,Na)NbO3 (KNN) thin films and compared the power generation performance with PZT-thin film energy harvesters. Both of the piezoelectric thin films were deposited on Pt/Ti/Si cantilevers by rf-sputtering. The KNN and PZT thin films had perovskite structure, and showed the relative dielectric constants of 744 and...
متن کامل